Silicon MEMS Printheads

By FUJIFILM Dimatix, Inc.

Fujifilm's Si-MEMS technology uses Micro-Electro-Mechanical Systems (MEMS) fabrication techniques to develop printhead families that can take advantage of high-fidelity features. These silicon MEMS-based printhead products contain a precisely controlled nozzle shape and position enabling high drop placement accuracy over high throw distances. Additionally, FUJIFILM Dimatix printheads include energy dissipating technology, and a range of internal and external coatings yielding wide ink type latitude and reliable quality output. High-speed jet design paired with Fujifilm's REDIJET® dual recirculation and energy dissipating technology means quick start-up, fast printing, and reliable jetting. VersaDrop technology provides optimal drop size selection at all times. The robust silicon structure lends itself to solid, reliable operation and long service life – all of which are desirable attributes for building new printer architectures and enabling new applications. FUJIFILM Dimatix's silicon MEMS printheads are made using Fujifilm's proprietary sputtered piezo material, which has a number of advantages. This piezo is poled as it is deposited, which keeps internal stresses low for a long life, and allows for thicker, stiffer films, which contributes to the robustness of the jets. Also, since sputtered PZT is highly heat resistant, it can survive high temperature manufacturing including the addition of protective coatings that must be applied at high temperature. Since the PZT is not formed from compression and sintering as in bulk PZT, it is less susceptible to the formation of voids, which can concentrate stress. This enables sputtered PZT to tolerate high drive voltages. FUJIFILM Dimatix's silicon MEMS printheads provide: - Up to 1200 DPI - Drops as small as 2 pL - Sputtered PZT technology - Internal and external coating technologies