iLab Coating Research System

By GVD Corporation

GVD’s iLab coating research system is a laboratory-scale chamber that is fully-automated, and ideal for exploring initiated chemical vapor deposition in any academic or commercial research lab. Our scientists and engineers work with you to deliver a research or educational tool that grants the greatest range of possibilities for coating development utilizing a recipe-driven, easy-to-use, automated system. We help you reduce design and installation time, material discovery and optimization period, and help advance to technology licensing for custom applications. - Small footprint, fully contained in a vented enclosure - High performance system with customizable configurations - Low cost of ownership & maintenance - Ability to deposit a variety of materials, including polymers, inorganics and many others - Intuitive PC-based control system - Options for full-service expert support Core System Features Dimensions: 6.5’ Width, 6’ Height, 3’ Depth Custom stainless steel vacuum chamber with temperature controlled stage Tensioned hot filament array Heated precursor delivery system with automatic temperature control Real time thickness measurement via optical interferometer Automatic pressure control via heated capacitance manometer and throttling valve Oil-sealed rotary vane vacuum pump with foreline trap and outlet mist filter Optional Features — Equipment Add-Ons Additional precursor feed lines Low-volatility precursor delivery system Programmable DC Power Supply for filament heating Safety and Automation Package In-situ thickness measurement via quartz crystal microbalance (QCM) Dry pumping system Automatic flow control Recipe-driven control system Help & Support on Demand Extended service and support agreements On-site Training Licensing for custom applications Many of our iLab customers have no prior experience with iCVD. We often offer process support and/or codevelopment agreements. It is difficult to coat substrates with oCVD and iCVD coatings using the same process chamber, but we have sold standalone oCVD coating systems, and can offer a single iLab system with two process chambers: one for iCVD, and one for oCVD. A standard iLab system can coat substrates ranging from a 6” wafer, up to 1 cm in height. Substrates must be vacuum compatible, meaning they will not outgas, shrink, or expand when exposed to a vacuum environment. iLab systems can be tailored in a number of ways to suit a customer’s intended application. The most common customizations include number and type of precursor inlets, vacuum pump type (oil vs. dry), thickness measurement scheme, and spare chamber ports. Standard lead time is 16-20 weeks, but demo or used equipment may be available with a shorter lead time.