LprobeSoft03 Al-Si

By Vmicro

Features - New MEMS technology unlocking probe engineering - Long tip with profiled shape - small cone angle - TrueTipView: Precise tip visibility thus accurate landing on sample - Vertical sidewalls probe chip for easy handling Applications - Topography imaging in - Soft tapping mode - Force modulation mode - Roughness measurements - Nanoscale imaging on highly corrugated samples - Challenging aspect ratios Specifications Parameter Unit Nominal Range Frequency kHz 90.0 50-150 Spring constant N/m 3.0 1-8 Tip height H t µm 30.0 15-50 Tip apex radius nm 7.0 2-10 Tip side angle θ ° 15.0 +/-0.5° Tip-cantilever angle α ° 118.0 +/-0.5° Cantilever length L c µm 115.0 +/-1 Cantilever width W c µm 40.0 +/-1 Cantilever thickness T c µm 1.4 +/-0.15 Cantilever backside coating Al Tip-side coating Uncoated Tip and cantilever material p-doped Silicon 0.01-0.02 ohm-cm Chip dimensions mm 3.4x1.6x0.4 Cantilever & tip details - Tilted tip design Compensates for the AFM head mounting angle, ensuring accurate data on diverse sample surfaces. - Tip height 30 µm Enables imaging of deeper or difficult-to-access sample regions. - Tip side angle 15° Minimizes tip-sample convolution for more accurate morphological measurements. - Tip apex radius 7 nm Provides reliable resolution for advanced AFM applications. Lprobes: AFM Probes based on in-plane silicon technology