Long travel Z Stages with Linear Drives When Precision Has to Travel Further High precision does not always happen over short distances. Machine architectures in semiconductor manufacturing, automation, metrology and advanced processing may require considerable Z travel while still demanding controlled, repeatable positioning. ALIO's linear-motor-driven long-travel Z stages combine high-precision crossed roller bearings and linear encoder feedback with either magnetic-spring or frictionless pneumatic counterbalancing. Magnetic-spring-counterbalanced configurations support travel from 25 to 170 mm, while air-bearing pneumatic counterbalance configurations can support payloads up to 25 kg over travel of 200 mm or more. The ability to mount payloads directly to the stage face further supports mechanically efficient machine architectures without unnecessary structural interfaces. Details: Magnetic Spring Counterbalanced Z, Linear Drive; AI-LM-(TRAVEL)00-Z-MCB-(MAX PAYLOAD) Extra Long Travel Z: AI-LM-(TRAVEL)00-(PAYLOAD)-Z-MCB-BASE Long Travel, High Payload: AI-LM-(TRAVEL)00-Z-ABCB-(OPTION)
Nano Z® – Dual Voice Coil Stage with Air Bearings When Nanometer-Level Vertical Precision Is the Priority Some applications place ultimate Z-axis precision above almost every other consideration. ALIO's patented NANO Z® architecture combines air bearings with dual voice-coil motors to provide frictionless vertical motion in a compact platform. By aligning vertical force with the payload, the architecture reduces the cantilever effects that can translate into pitch, yaw and roll errors at the work point. The system offers up to 50 mm of travel, while variable counterbalancing enables demanding payloads such as wafer chucks to be managed without surrendering nano-level positioning performance. Air-bearing operation also eliminates mechanical contact and associated friction, supporting extremely smooth motion and repeatability into the low double-digit nanometer range. For semiconductor processing, advanced metrology and other applications where vertical motion can directly influence measurement or process integrity, NANO Z® provides precision by architecture rather than compensation. View datasheet
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ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology. Micron II Rotary: AI-TM-(DIAMETER)RA-UII
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ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications. To know more about this family of stages, check out the spec sheet.
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ALIO Industries' open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market. Download our product spec sheet for more details.
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