The software for fully automated measurement and analysis routines Metrology Automation ASCAN is the solution for fully automated measurement routines. Define your scan settings, surface analyses and filters once and receive high-accurate, consistent results – completely user-independent. Boost your efficiency and accuracy in production with ASCAN. Key Features Automized 3D and 2D Analysis Fully automate your 2D and 3D measurement and analysis routines with ease, streamlining complex processes for maximum efficiency without user interferance. Automated Fiducial Alignment The system’s built-in camera or sensor uses fiducial recognition for automatic detection – with the software adjusting to the detected position and rotation. This can be applied globally across an entire batch, individually for single samples or as a combination of both for versatile operation. Easy-to-Use Interface Create and edit programs easily with an intuitive, menu-driven interface – no programming skills required. Code Reader Integration Utilize the sensor, expand your system with an integrated code/OCR reader or connect an external code reader via USB. Codes can be read, processed and applied to automatically select the measurement program. Step- & Repeat Configure measurement routines for individual samples or entire batches, enabling fully automated measurement and analysis processes. Define Tolerances (UCL, LCL, UWL, LWL) Define tolerances (UCL, LCL, UWL, LWL) easily through ASCAN’s intuitive interface, which provides direct and clear visual feedback for the operator if the values are in the tolerances or not. Production Ready The system features integrated SPC (Statistical Process Control), data recording and external (web) server support, enabling seamless integration into your production environment with optional SECS/GEM compatibility. User Management The system features integrated user management – enabling assignment of roles with tailored access levels, including admin, operator or custom user-defined permissions. This functionality enhances security and control, ensuring that each user only accesses the features relevant to their role, promoting a streamlined and secure workflow. Automated Analysis ASCAN offers over 500 individual analysis and more than 100 data operations. These can be fully automated, allowing measurements and analyses to be done without user intervention. This automation ensures consistent, repeatable results with fast feedback time and reducing the potential user errors. 2D Analysis (100+) Perform 2D measurements and analysis with over 100 individual analysis: - Height / Flatness - Area - Angle - Print Anaylsis - Roughness (i.e. Ra, Rz) - Feature Sizes - Edge Analysis - Histogramm - Fillet Height - and many more Fast Data Processing - Handles measruements with up to 1 billion datapoints - Multi-Thread Technology for fast data hand anaylsis processing - Parallelization of most analysis and data operations allows for simultaneous scanning and analysis, ensuring no time is lost in the process. Templates Create templates for analysis, measurement and reference areas, data operations and 3D map or 2D visualization, allowing for streamlined and consistent workflows. Once designed, these templates can be applied automatically or manually, saving time and ensuring uniformity across multiple samples or processes. Export Filters Export raw measurement data, results or 3D and 2D images of your measruements in a vast variety of formats in dataformats like csv, PCD Point Cloud, Standford Polygon File, image files like tiff, jpg, png or many more. Manually in ScanCT or automated in ASCAN. 3D Analysis (400+) Our software includes over 400 individual analysis for 3D measurements: - 3D Height / Flatness - Coplanarity - 3D Area - Volume - 3D Angle - 3D Roughness (S-parameters) - 2D Roughness paramters on an area - 3D Feature Sizes - Position measurement - Sphere & Aspheric lens - Radius - Histogramm - 3D Fillet Height - 3D Wirebond (optional) - Bow, Warp, Stress, Sori - 3D-Abbott-Firestone - and many more Sophisticated Data Operations Leverage over 100 2D and 3D data operations to focus on what matters most to you, with options for quick, effortless use in just a few clicks or fully automated execution. - Normalization - Median - Compensations (e.g. waviness, previous scans) - Polynomial fits - Cut-Offs - Gauss-Filters - Gravity compensation - User-defined filtering - and many more Feature Detection Manually or automatically detect features based on height or intensity data with adaptable filter lists, providing clear visual guidance throughout the process.
Resolution: down to 50 nm Speed: up to 36 million datapoints /sec Features: Interchangeable sensor heads Linesensor 2 Measuring rate: 7.9 – 18.3 kHz Light source: Laser Diodes Measurement points per line: 1200 Sensor head Measuring Range Working distance Axial Resolution Measurement angle Line length Pitch L-CHR2 600 680 µm 9.2 mm 50 nm +/- 50° 2.36 mm 1.97 µm L-CHR2 2500 2500 µm 27 mm 200 nm +/- 33° 4.40 mm 3.69 µm L-CHR2 10000 10600 µm 36.6 mm 800 nm +/- 13° 11.9 mm 9.90 µm Linesensor 2 Pro Measuring rate: 7.9 – 36 kHz Light source: Laser Diodes Measurement points per line: 1200 Sensor head Measuring Range Working distance Axial Resolution Measurement angle Line length Pitch L-CHR2 1250 Pro 1250 µm 13 mm 100 nm +/- 45° 4.50 mm 3.75 µm L-CHR2 2400 Pro 2400 µm 21.4 mm 200 nm +/- 38° 8 mm 6.67 µm L-CHR2 3000 Pro 3000 µm 40 mm 250 nm +/- 15° 20 mm 16.67 µm L-CHR2 5000 Pro 5000 µm 42 mm 400 nm +/- 25° 11.9 mm 9.92 µm
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For high-resolution lateral measurements Resolution: up to 235 MP Speed: up to 72 fps Available Models Camera Type Camera Type Color Native Resolution Maximum Resolution (Pixel Shift) Frame Rate 235M Monochrome 5120 x 5120 15360 x 15360 px 72 fps (8 fps for maximum resolution) 235C RGB 5120 x 5120 5120 x 5120 px (True Color) 72 fps (8 fps for true color mode) Objective Objecive Working Distance Magnification Field of View Aperture Lateral Resolution Xenon-Sapphire 110 mm -1.53 15 x 15 mm² 0.09 0.98 – 2.9 µm Working Principle This advanced measurement technology offers precise distance measurements using a polychromatic light source. Pixel Shifting Pixel shifting boosts resolution beyond sensor limits by capturing multiple shifted images. High Resolution The VWC-235M achieves 235 MP in black and white, while the VWC-235C captures high-resolution color by recording separate RGB values for each pixel.
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Production software for a fully automated metrology process. Management for Metrology Systems. M-Link is our software for controlling handling and multiple metrology systems. Operator-friendly and easily integrated into production environments through SECS/GEM. Key Features: Overview at a glance - Get a real-time view on handling, systems, magazines, measurements and results. Touch screen optimized - Full touch control designed for cleanroom environments. Production ready - SECS/GEM integration for seamless connection to your production environment. ASCAN remote control - Use M-Link to control ASCAN automation software, optimized for full-scale production environments.
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High-Throughput Wafer Metrology Measurement and Analysis Modes Fully Automated including Handling Measurement Area up to 2x 250 x 250 mm² single or double-sided Use-Case Examples Step Height, Flatness (Bow, Warpage), Coplanarity (Bumps, Plugs), Thin Film, Lasermarks and many more Fully Automated Metrology Cell The AL 200D integrates two dockable CT 300 or CT 350T units with a wafer handling system, supporting wafers from 4” to 8”. This design maximizes throughput and can be used for a wide range of front-end applications.
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