Reticle and Substrate Interface Solutions Interface systems support handling, isolation, and transfer between process steps, reducing contamination risk and ensuring consistent operation. Brooks reticle interface solutions are trusted worldwide on EUV lithography tools running today. Their reliability and cleanliness demonstrates what an effective automation interface should be – proven, consistent and trusted, to eliminate operational disruption. Reticle Interfaces Designed into 25 OEMs, Including Leading-Edge Lithography
GuardianPro® 1900P, GuardianPro® X / F / S, GuardianPro® C platforms GuardianPro® C, PuroMaxx® 2 Tracking and visibility capabilities across GuardianPro® platforms
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PreciseFlex robots are designed to automate repetitive handling tasks where automation must operate safely alongside people. These robots support manufacturers looking to improve consistency and throughput without introducing rigid automation architectures that are difficult to change. PreciseFlex robots are commonly used for applications such as electronics test & handling, machine tending, part transfer and pick-and-place. Their flexible design allows manufacturers to deploy automation incrementally, adapt workflows over time, and apply automation where it delivers the most value within existing operations.
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Vacuum robots provide precise wafer handling and transfer within process tools, maintaining consistent positioning and repeatability. Configurations support advanced processes, including high-temperature environments. Brooks solutions: MagnaTran® Vacuum Robots, MagnaTran® High-Temperature Robots, Leap™ Vacuum Robot Platforms
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Vacuum systems coordinate wafer transfer across atmospheric and vacuum environments, integrating EFEM, load ports, and process modules. These systems maintain consistent flow between process steps and support stable production performance. Brooks solutions: Marathon® Vacuum Systems, Marathon® EFEM Platforms, Load Port Systems
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