By LAB14
The EnviroMETROS system by SPECSGROUP will expand MIT.nano’s Characterization.nano instrument suite. Its functions include: - nondestructive depth profiling using multiple X-ray energies - determination of thin-film thicknesses and chemical compositions with high precision - analysis under a wide pressure range to assess material behavior in realistic environments These capabilities support research involving thin-film materials, surface chemistry, and in-operando studies.
The VPG 300 DI from Heidelberg Instruments will be installed in the MIT.nano cleanroom. The system enables: - direct-write lithography with feature sizes below 500 nanometers - high-resolution patterning comparable to i-line lithography - advanced multi-layer alignment and mix-and-match workflows The tool supports research requiring precise micro- and nanoscale structuring and provides a link between laser direct writing and electron-beam lithography.
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