By Arradiance
Recommended pump package ARR-EV-A10-P-EPP — engineered for GEMStar. The Enhanced Dry Pump Package is the combination of the ARR‑EBARA EV-A10 dry pump and our ARR‑RD003000 dry-pump multi-trap. Engineered in partnership with critical suppliers for optimum process performance and low maintenance without sacrificing reliability. This combination is what our own service chase runs — even under heavy use it has eliminated pump failures through unexpected power outages and factory shutdowns.
GEMStar XT · Thermal ALD The ALD deposition workhorse. For solar cell, biotechnology, energy research and beyond. GEMStar XT delivers reliable thermal ALD and MLD on the most demanding R&D bench. - Reactor temperature up to 300°C - Up to four movable bottle-heated zones - Gas distribution delivery up to 200°C - Pulsed Vapor Push (PVP™) for low-vapor-pressure precursors - Flow-through and exposure deposition modes - Substrates up to 200 mm — single-substrate or batch cassette; configurable end effectors (200 mm default, 150 mm and 100 mm options) - Proven beyond the lab: used in cluster tool configurations and on production lines - MFC-controlled carrier gas input - GEMFlow™ control software with real-time user interface
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PRIME™ VERDE · Thermal & plasma-enhanced MLD The first of its kind. PRIME VERDE was designed specifically to address the unique challenge of handling and delivering organic precursors — the first commercially available solution developed specifically for molecular layer deposition (MLD). - Specifically designed to excel at growing organic films - In-situ self-clean maintenance for organics - Effectively supports and delivers the most challenging precursors - Intuitive multi-level heads-up graphical user interface (GUI) - Next-generation safety protocols protecting the system and operators - Fully supports 2D and 3D objects - Field-reconfigurable as your needs change
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PRIME™ CUSTOM · Configure your ideal solution Start with a base. Build exactly what you need. Begin with either the PLATINUM or VERDE base, then configure it to meet your current and future MLD, ALD, or hybrid-film requirements. Not ready to buy yet? Our foundry can run your process on a PRIME system first, through our ALD and MLD coating services. - Customize for your substrates and specific precursors/materials - Numerous plug-and-play options to meet demanding requirements - Designed for ease of service and maintenance - Field-reconfigurable as your needs change - Substrate support tailored to your specific substrate(s)
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Glovebox Integrated Systems · Environment isolation Single, dual, and custom glovebox-integrated stations. Any GEMStar reactor — XT, XT-R, or XT-P — can be paired with an integrated glovebox for moisture- and oxygen-sensitive work. Side and back mounting, multiple antechamber sizes, and full automation. - Side and back mounting - Large and small antechambers - Integrated gas-purification system - PLC controller and HMI - GEMStar stand and frames - Automated antechamber regeneration - Automated large-antechamber purging - Vacuum pump - Controlled to less than 1 ppm moisture and oxygen
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