By AMT&C Group (Advanced Magnetic Technologies & Consulting Group)
Rotatable multi-pocket e-beam source with 270° beam deflection and water-cooled unit. E-beam source special design eliminates cross-contamination during evaporation process. Rotatable hearth is removable for easy cleaning. The removable lid and crucible make it easy to replace the loading module, quickly changing the configuration for various technological tasks. Technical characteristics - E-beam deflection angle: 270° - Power rating: 10 kW - Operating voltage: 6-10 kV - Crucible volume: up to 4x30 cm3 or 6x15 cm3
Materials: H2 Advantages: - Low energy consumption - Absence of high-energy particles and ions - Integrated water cooling Technical characteristics Thermocouple: Type C Bakeout temperature: 200°С Operating temperature: 2000°С In-vacuum length: 190-400 mm In-vacuum diameter: 36 mm Mounting flange: 40CF
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Materials: N2, H2, SiH4 ADVANTAGES: - PBN ionization chamber - Integrated matching device - Inductive plasma Technical characteristics - Input power: 50-400 W - In-vacuum length: 292 mm - Mounting flange: 63/100CF
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Counter-rotating vane set provides for linear control across the entire operating range of the valve. The precise setting of vane rotation of the plates is realized due to the servo-based flap control system.
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