
By Laurell Technologies Corporation
Simple and Effective An edge bead is a build up of your coating chemistry at the edge of your substrate, and can cause issues with further processing. It is best removed immediately after coating. Manual Edge Bead Removal provides a simple and effective solution for occasional use. For topside edge bead removal, the syringe is secured using locking ball mount fixed into the system lid. You can adjust the position of the needle to account for several different diameters of substrate. The range of wafer diameters that the EBR can be used with is determined by the position of the mount on system lid. When used on our largest systems, more than one manual EBR may be needed to cover the range of wafer diameters required. In addition to the topside EBR shown, manual backside edge bead removal is also available.

Spin Coaters and Spin Processors. Models shown: Laurell EDC Spin Processor with Touch Control and foot switch, Laurell H6-8 Headless, Laurell EDC Spin Processor in Wet Station, Laurell H6-8 Spin Processor in Wet Station.
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Using the right chuck improves coating quality. High porosity chucks for standard cover slip sizes and embedded chucks for standard microscope slides are available direct from Laurell. If you have an unusual shape and/or size substrate, a custom chuck can be made for a perfect fit.
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Spin Coaters and Spin Processors. Models shown: Laurell H6-23 Headless, Laurell H6-23 with extended upper housing, Laurell WS-650-23 wet station, Laurell Spin Coater with Single Shot Dispenser (SSD).
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