By Integrated Dynamics Engineering GmbH
Active Vibration Isolation Modules - Market leader in active vibration with over 12,000 installed - Isolation in six degrees of freedom - High speed actuation and digital control - Broadest range of isolation available beginning at 0.7 Hz
Payload up to several tons Extremely accurate horizontal & vertical motion range Cleanroom class ISO 1 Vacuum tool compatible Tool integrated w/o footprint increase
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Active Vibration Platform - Sandwich style isolation platform - Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances - Compact design with integrated controller enables easy installation and tuning - Ultra-fast settling time - Stage and floor feed-forward options
CATEGORY
Sandwich style isolation platform Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances Compact design with integrated controller enables easy installation and tuning Ultra-fast settling time Stage and floor feed-forward options
CATEGORY
