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Engineered Systems

By Amtech Systems

Entrepix is known for its expert engineering team that has developed performance and reliability upgrades, replacement of obsolete parts and sub-assemblies as well as a module refurbishment and exchange program that greatly enhances customers’ ability to keep their critical production equipment up and running.

More from Amtech Systems

TrueFlat solder reflow equipment

Differentiated TrueFlat solder reflow equipment for processing ultra-thin substrates

High volume solder reflow equipment

High volume solder reflow equipment used by leading OSATs and OEMs for advanced packaging of most AI semiconductor devices

Wafer Cleaning

Through Entrepix, Inc. we offer double sided 200mm wafer cleaning systems used for both silicon and compound semiconductor applications. These cleaning systems are used in process steps including post-CMP clean, pre-bond clean, pre-photo clean, post-ILD deposition, and advanced packaging applications.

Diffusion Furnace

Through Bruce Technologies, we manufacture and sell 200mm and 300mm horizontal diffusion and deposition furnaces, which address several steps in the semiconductor manufacturing process, including diffusion, LPCVD, high-temperature oxidation, and annealing. Bruce Technologies’ 300mm HTR furnace is a leader in HTR diffusion for power semiconductors.