By Technoprobe
The housing is a metal frame that supports the ceramics where the probe card’s probes reside, ensuring a precise connection to the chip that will be tested. To function correctly, the housing requires the creation of calibrated holes with micron-level positional precision and a flatness of the entire piece that must not exceed 10 microns.
Fully Automated Probe Card Analyzer Redefining performance in Probe Card analyzing Athena is a new generation metrology tool designed to perform better POR optical, mechanical, and electrical measurements on Probe Cards. 3x faster optical alignment Flying probe loopback 6 µm V-align spec 600 kg force 3x faster wire check Optical planarity measurement Highlights - High-precision optical probe position measurement in X, Y, and Z including planarity - Fine-pitch probe measurement, as low as 25 µm - Multiple probe types in single array - Flexible, feature-rich vision system for wide variety of probe types - Probe tip 3D morphology - Probe free-tip-length measurement - High channel count: 9216 - Loaded and unloaded electrical planarity measurement - DC loopback testing - Board-only testing - Contact resistance stability across multiple probe tip metallurgies - High-frequency testing (AC loopback) - High array force up to 600 kg - Full-wafer 12’’/300 mm - Closed-loop stages with 0.01 μm encoders - High accuracy and stability: demonstrated tool-to-tool correlation across fleet - Interchangeable interface design: compatible for probecards of any tester platform (V93k, Ultraflex, HDMT…) - Fully automated: choose any suite of tests - Test data analytics - Option: multiple-probecard autoloader, or debug station Measurement capabilities Optical alignment by 3D inspection system (WLI, white light interferometer) Unloaded electrical planarity by post Loaded electrical planarity by plate Contact resistor versus conductive plate Leakage at overtravel and without load Test of capacitors value in farad Test of resistors value in ohm Electrical continuity check and path resistance measurement on loopbacks within ST or PCB Capacitor leakage at overtravel and without load Probe Card load in overtravel Measurement | Athena Capability (σ) | Comparison to Legacy Analyzer Optical Alignment @WLI | X/Y = 0.16 um | 2x better Z = 0.15 um | N/A LEP@Plate | 0.3 um | 2.75x better Cres@Plate | 0.005 Ohm | 5x better Array Force | 0.25 kg | N/A Performance benchmark Measurement | Athena Acquisition time | Legacy Acquisition time Optical Alignment @WLI | 90 min | 240 min Cres@Plate | 90 sec | 15 min Leak@Free | 3 min | 5 min CAP | 4 min | 20 min UEP | 7 p/sec | 2 p/sec Throughput benchmark
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Probe cards are hi-tech devices for testing the functioning of chips during their construction process. A probe card is an electromechanical interface that allows testing the functioning of a chip when it is still on the wafer or before it is individually packaged. The probe card makes contact with the pads or bumps of the chips. Once it has made contact with the chip, the probe card connects it electrically to the tester which checks the functionality of the chip. Each probe card is custom made for the chip to be tested. They are highly technological devices. Probe cards can have more than 50,000 contacts and the distance between them can be as small as 40µm (4 hundredths of a millimetre).
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Enables deep debug on Probe Cards and 100% tests. Compatible with legacy motherboards.
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