PDC-VPE (115V) | PDC-VPE-2 (230V) Basic Model (lower cost) Pumping Speed (50/60 Hz): 5.1 m3/hr Ultimate Total Pressure (gas ballast closed): 7.5 mTorr Ultimate Total Pressure (gas ballast open): 150 mTorr Motor Power (50/60 Hz): 373 W Weight: 27 lbs Size: 9.75" H x 14" W x 5.5" D Pump inlet: includes check valve, hose, hose clamps, and hose adaptor to connect plasma cleaner to pump inlet Pump outlet: includes oil mist filter to filter oil vapor from pump exhaust Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less. Rotary vane pumps with hydrocarbon pump oil are suitable for pumping nonreactive or inert gases (e.g. Air, N2 or Ar). These pumps are not intended for pumping oxygen. For corrosive or reactive gases, consult with us directly.
PDC-VCG (115V) | PDC-VCG-2 (230V) The optional PDC-VCG provides a vacuum gauge and digital meter as a stand-alone accessory and may be used with any of our plasma cleaner models. The ability to monitor vacuum pressure during plasma processing is beneficial for process repeatability and consistency. Features - Thermocouple vacuum gauge sensor connects to plasma cleaner door - Digital meter displays pressure range of 1 mTorr to 760 Torr - ¼” OD hose adapter included to connect gas line to metering valve on plasma cleaner door - Weight: 5 lbs | Size: 5″ H x 10″ W x 8″ D
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PDC-00Q for our Expanded Plasma Cleaners - Purchase of the plasma cleaner includes a Pyrex chamber - Pyrex is sufficient for most plasma cleaning applications of glass slides, silicon wafers, and polymers - An optional quartz chamber substitution is recommended for use with fluorinated gases (e.g. CF 4) and for samples or applications that are very sensitive to the elements that make up the chemical composition of Pyrex (borosilicate glass)
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PDC-00T Quartz | PDC-00T-P Pyrex 5.5″ W x 6.5″ L for our Expanded Plasma Cleaners - Sample trays provide a horizontal surface for loading and unloading of small samples and for batch processing - Quartz is recommended as it is purely SiO2 and is a more stable material to use for plasma processing
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PDC-00T Quartz | PDC-00T-P Pyrex 5.5″ W x 6.5″ L for our Expanded Plasma Cleaners - Sample trays provide a horizontal surface for loading and unloading of small samples and for batch processing - Pyrex sample trays are a more affordable option and sufficient for most plasma cleaning applications
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