GEMStar XT-R™ Benchtop Thermal ALD System

By Arradiance

The GEMStar XT TM platform is the industry’s only true benchtop Atomic Layer Deposition (ALD) System, now more configurable to meet our Customer’s needs and budgets GEMStar XT TM family produces best in class ALD films from high aspect ratio particles through 200mm substrates both in single substrate and batch modes of operation Not yet ready for PEALD development, the GEMStar XT-R TM Thermal Atomic Layer Deposition systems offers 300 °C (450 °C optional) ALD processing through the full range of substrates, including Solar Cell ALD development and the ability to upgrade to full Plasma Enhanced (PEALD) capability in the future! Configured standard with either a single (S) or dual (D) 200 °C manifold zones, four (S) or eight (D) high speed material ALD valve ports (one with vapor push technology), two locatable 200 °C material temperature zones and an external gas interface, the GEMStar XT-R TM represents one of the most configurable systems in its price range. Key System Features Adjustable reactor temp up to 300°C Up to 200°C uniform gas distribution delivery Pulsed Vapor Push (PVP TM ) to handle very low pressure material Selectable flow-through and exposure modes of deposition Substrate configurable end effectors up to 200 mm diameter substrates, batch cassette options as well as a heated platen User selectable carrier gas MFC controlled input up to 200 SCCM Field proven GEMFlow TM Control System Watchdog protection and EMO interface Operator touch safe exterior Ease of Operation The Arradiance GEMFlow TM Software provides complete user control over all key operating parameters such as temperature, gas flow rate, high-speed ALD valves and vacuum isolation. Preloaded on business level Windows® Laptop User created processes can be saved enabling substrate to substrate and batch to batch consistency without sacrificing flexibility Diagnostic system and logging creates traceable data of all system parameters during operation Internal GEMStar XT USB control module Safety GEMStar XT Systems are designed to be SEMI S2 Compliant where applicable without sacrificing the needs of material research and development needs CE Compliant, CSA Optional Watchdog protection and EMO interface Operator touch safe exterior RGIP TM Reactor Gas Injection Protocol avoids accidental, unwanted, or unsafe chemical material reaction for all gas injection ports for simple and complex nanolaminate processes Serviceability Modular ergonomic design with top panel access to all critical components Fast precursor changes and reconfiguration Easy access power, vacuum and gas connections Perfectly suited for glove box configuration Specifications System Dimensions 11” H x 32” W x 24” D designed to fit on desktop or lab bench Door Mounted Substrate End Effector Specify end effector diameter at time of order (200 mm default, 150 mm, 100 mm) Other sizes or batch cassettes available on request Reactor/Door Thermal Zones Two controllable zones up to 300 °C ± 1 °C 450 °C Processing available on request Material Manifold Single (S) or Dual (D) controllable manifold zones up to 200 °C Four (S) or eight (D) High Speed ALD Valve Controlled Material Ports Single Pulsed Vapor Push (PVP TM ) Zone controlled by High Speed ALD Valve Material Bottle Heated Zones Up to four movable zones up to 200 °C Material Bottles Up to four or six (2 STD) DOT certified 150 ML Bottles with bellows sealed valves External Gas Input Single-S or up to four (2 STD)-D Input for external gasses such as optional Ozone Inert Carrier Gas Mass Flow Controlled up to 200 SCCM Control System GEMFlow TM Control Software Windows® Professional 64-bit Laptop GEMStar XT TM USB control module Metrology Port Spare KF-40 In Line metrology port for QCM or other customer needs Vacuum Gauge Convection Vacuum Gauge Upgradeable PEALD KF-50 PEALD Reactor for Plasma Enhance capability Equipment Safety Emergency Off Standard DB9 port to support EMO or other safety shut down requirements Touch Safe All Exterior Components thermal and electrical Watchdog System shuts down to Safe mode if communication is lost with computer Normally Closed Vales All internal valves close when power removed Certification CE Marked Designed to comply with applicable SEMI S2 guidlines CSA optional on request Facilities Requirements Carrier Gas 20 psig ± 5% psi regulated VCR-4 Type Connection CDA (Clean Dry Air) 80 psig ± 5% psi regulated AC Power Dedicated 110-120 VAC 50/60 Hz 20 Amps System Weight <150 lbs. Vacuum Pump (optional) KF 50 Vacuum Connection Minimum of >= 12 cfm Fomblin Two Stage Rotary Vane Vacuum Pump or Dry Pump