Discover how nanotools EBD4-200A probes are enabling metrology solutions for real-life semiconductor manufacturing. These heavy-duty carbon tips are effectively used for in-line process control for structures that cannot be measured with optical methos like scatterometry. Experimental setup: Samples: Resist recess trenches on product wafers. Trenches were filled with resist and then etched back. Tool: Park NX-Wafer operated in fully automated recipe mode, Park Systems AFM probe: EBD4-200A, nanotools Extracted feature parameters: Resist recess trench depth Key findings: Single AFM tool (200 nm narrow, 1035 nm deep trenches) 0.6 nm < σ < 1.4 nm: 10-times dynamic repeatability of 5 dies Accuracy: dimensional verification by cross sections in SEM Measurement time: few seconds/site + 60 seconds for sample positioning 2 AFM tools: Fab to fab matching (480 nm deep trenches) < 5 nm offset: 3 runs of 9-point recipe running the same wafer in 2 different fabs
The option to choose from a large variety of cantilevers combined with the nanofabrication of high density diamond-like carbon SPM probes based on electron beam induced processing offers exceptional flexibility and customisability. This approach enables us to fabricate personalised SPM probes, which truly meet your technical requirements: combine cantilever, tip shape, tip orientation and tip coating according to your individual needs or contact us for any further probe designs. 100% ultrahigh resolution SEM quality check for every tip available. Certified quality management system according to ISO 9001. Cantilever options: Tip options: Tip orientation options: Coating options: Didn't find what you were looking for? Please do not hesitate to contact us for any further tip design and specification. We will create your personal tip of almost any desired geometry and functionality.
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Metrology SuperSharp carbon AFM tips for the inspection of very fine high aspect ratio features - Down to <8 nm tip width at 50 nm depth - Tip apex radius of <2 nm for ultrahigh resolution AFM imaging on HAR features - For automated non-contact imaging at 75 kHz or 320 kHz
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Green Line product information: B20 - hemispherical AFM tip for high precision indentation measurements - Hemispherical tip shape. Reliable nanomechanical investigations and consistent data modelling. - Tip shape radius 20 nm ±5 nm. Fabricated with nm precision. - Force constant available from 0.2 N/m to 40 N/m. Matching a wide range of sample stiffness investigations. - Outstanding HDC/DLC tip hardness. Repeatable and reliable deformation measurements.
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Precisely shaped AFM tips with hydrophobic surface properties for challenging biological applications - Tip sharpness down to 2 nm combined with a soft cantilever for non-destructive high-resolution measurements - Tip length up to 15 µm for extended accessibility to subjacent regions on thick samples - Smooth hydrophobic tip made of diamond-like carbon for low tip-sample interactions and long-lasting tip performance
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