By Integrated Dynamics Engineering GmbH
The HMS rely mainly on the active control loop for isolation and have a much higher closed loop bandwidth than SMS. The hard mount systems typically address higher frequency isolation issues with the passive springs tuned to 10 or 20 Hz. This design feature results in making the HMS extremely stiff and allows for large stage or dynamic payload forces, while eliminating unwanted excessive payload motion.
Payload up to several tons Extremely accurate horizontal & vertical motion range Cleanroom class ISO 1 Vacuum tool compatible Tool integrated w/o footprint increase
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Active Vibration Platform - Sandwich style isolation platform - Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances - Compact design with integrated controller enables easy installation and tuning - Ultra-fast settling time - Stage and floor feed-forward options
CATEGORY
Sandwich style isolation platform Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances Compact design with integrated controller enables easy installation and tuning Ultra-fast settling time Stage and floor feed-forward options
CATEGORY
