By Ultrasonic Systems, Inc. (USI)
The Prism 500 and Prism 800 systems are available with an integrated dry station. The dry station can be added to a Prism system with an edge carrier conveyor. With this configuration, the substrate moves from the load station into the coating station for coating application. After the coating process is completed, the substrate moves to the dry station where a vacuum hotplate lifts to dry the substrate for a programmed time. Applications: - Polyimides - Photoresists - Protective Coating for Plasma Dicing - Optical Coatings Prism 500: - Substrates up to 410 mm wide - Wafers - Glass Prism 800: - Substrates up to 700 mm wide - Copper Panels - Glass Panels
Sputtering and plating are commonly used to apply component-level EMI shielding layer between 3 and 6 µm thick. These methods add substantial cost to the process, are limited to moderate throughput, and add complexity to the process flow. New EMI shield coating materials recently available in the market are high-density slurries with proprietary formulations that produce a continuous conductive layer on the substrate after coating. These new materials provide excellent EMI shielding characteristics for package-level shielding. Since these coatings can be applied with a much simpler, more scalable, and cost-effective spray coating process, such as T-CAT, they enable manufacturers a straightforward path to higher board densities, increased design flexibility, and simplified the bill of materials for smaller, lighter device designs. The EMI shield coating application process is simple and fast with this direct spray method. The components are first placed on the dicing tape using standard placement equipment. The carrier is then loaded onto the coating system conveyor and it is transported into the coating location inside the system. The coating process recipe is then activated and the EMI shield coating is applied to the components on the carrier. Once the coating process is complete the carrier moves on the conveyor to exit the coating system. The carrier is placed into a batch oven at the specified temperature and time period for curing. In order to ensure that a uniform coating is applied to the top and side surfaces of the components on the carrier a defined coating sequence is required. This four (4) layer coating sequence operates as follows. A 5-position rotate and tilt mechanism is used to position the ultrasonic spray head during the coating process; the spray head has two (2) rotational positions (0 & 90 degrees) and two (2) tilt positions (forward and reverse up to 45 degrees) providing four (4) possible approach angles for the coating process. The tilt and rotate position of the spray head is defined for each layer so that every exposed surface of the components is coated. USI’s nozzle-less ultra-Thin Coating Application Technology applies a thin, uniform conformal coating of advanced EMI shield materials from all major suppliers. When properly applied, these new formulations provide equivalent performance and reliability compared to traditional sputtering techniques. With up to 400% faster than PVD/sputtering, 90% lower CAPEX cost, and a compact footprint, USI’s high-performance spray coating equipment is the perfect solution for your EMI shielding process.
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The PV-360 is a high-volume, in-line spray doping system for the thin and uniform application of phosphoric and boric acid based dopants to crystalline photovoltaic cells for the in-line thermal diffusion and laser doped selective emitter processes. Now in its 3rd generation, the PV-360 leverages USI's proprietary nozzle-less ultra-Thin Coating Application Technology (t CAT) for a more uniform, thinner coating compared to conventional nozzle based spray, roll coating or fog coating technologies. Features and benefits: - Proprietary, nozzle-less ultra-Thin Coating Application Technology (t CAT) - Typical coatings applied include: - Phosphoric acid based dopants - Boric acid based dopants - Compatible with water based and solvent based dopants - Non-contact coating application with excellent coating transfer efficiency – up to 99% - Process width: 914mm (36 inches) - Compatible with any in-line thermal diffusion furnace - Long-life, high speed traversing mechanism with servo motor drive - Constructed with materials compatible with acidic and caustic coating liquids - Isolated and ventilated spray area - PAC controller with touchscreen HMI - PMP-200 Precision Metering Pump liquid delivery system, features: - Servo drive positive displacement liquid metering pump - Dual pump design for uninterrupted operation - Automatic pump refill from on-board PFA coating reservoir - Data logging - Conveyor system: - Teflon coated Kevlar mesh belt - Up to 1.8 meters/minute (5.9 feet/minute) speed - Accommodates up to six (6) rows of 125mm (5 inch) wafers - Integrated water-based conveyor belt cleaning and drying system - Water-based conveyor belt cleaning system - Optional wafer drying system
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The PRISM-800 is a large format, high-speed X-Y-Z spray coating system designed for the thin, uniform application of coatings and suspensions for high-volume, high-throughput production requirements. This system features USI's proprietary, nozzle-less ultra-Thin Coating Application Technology (t CAT), which provides a more precise and repeatable coating application than conventional spray nozzles, ultrasonic nozzles, air-atomizing nozzles, roll coaters and film coaters. Features and benefits: - Proprietary, nozzle-less ultra-Thin Coating Application Technology (t CAT - Configurable, flexible platform to suit the requirements of precision coating applications in various industries including: - Semiconductor Packaging - Display - Fuel Cell - Medical - Fully programmable X-Y-Z motion control - Up to 780mm x 780mm usable spray area - High speed X-Y-Z gantry, process speed up to 700mm/second - Multiple liquid delivery system configurations including: - PMP-100 Precision Metering Pump liquid delivery system - Micro-stepping positive displacement liquid metering pump - Single or dual pump configurations available - Automatic pump refill from coating reservoir - Data logging - Automatic spray head clean and purge functionality - Designed to spray flammable coatings - Isolated and ventilated spray area - Windows 10 based graphical user interface - Optional substrate heater with vacuum - Optional powered HEPA filtration - Optional tandem spray heads for increased throughput - Substrate load and unload automation available - Optional spray head rotation and tilt functions - Dual substrate lift stations available - Many more options available
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The PRISM-1200 is a high-speed, high-performance spray coating tool designed for the thin, uniform application of a variety of low viscosity coatings to large glass panels (up to 1.2m wide) and other flat substrates. The PRISM-1200 leverages USI’s proprietary, nozzle-less ultra-Thin Coating Application Technology (t CAT) for a more uniform, thinner coating compared to conventional spray, spin, dip or roll coating technologies. Features and benefits: - Proprietary, nozzle-less ultra-Thin Coating Application Technology (t CAT) - Typical coatings applied include: - Anti-reflective coatings - Anti-smudge coatings - CdCl2 solutions - Carbon nano-particle, nano-tube and nano-wire solutions - Transparent conductive oxides - Adhesion promoters - Other proprietary coatings - Excellent coating transfer efficiency: up to 99% - Finished film thicknesses down to sub-micron level - Large substrate process width – up to 1,219mm (48 inches) - Long-life, high speed X-Y-Z gantry mechanism with servo drive - Dual PMP-100 Precision Metering Pump liquid delivery system, features - Servo drive, positive displacement liquid metering pump - Dual pump design for uninterrupted operation - Automatic pump refill from coating reservoir - Data logging - Isolated and ventilated spray area - Constructed with materials compatible with acidic and caustic coating liquids - Automated spray head wash down, clean and dry station - State-of-the-art control system with Touch Panel Graphical User Interface - Configurable as an in-line system or stand-alone - Conveyor system - Stainless steel roller conveyor - Programmable speed up to 3.3 meters/minute (10.8 feet/minute)
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