By Integrated Dynamics Engineering GmbH
For front end, back end, and advanced packaging applications Supports 200/300mm wafer, panels, masks Configurable for any customer demand
Since launching the first commercially available system almost twenty years ago, IDE has been the leader in EMI compensation systems. Today, with Integrated Dynamics Engineering's recent fifth generation product release, the MK5, SEM and TEM image quality is ensured in the harshest ambient conditions. An electron microscope's finely targeted electron beam and ultra-sensitive detectors are readily impaired by building electrical conduits, vacuum pumps, mechanical equipment, nearby traffic and even other microscopes. At times, the source of the image blur is intermittent and unknown. With IDE's combination AC/DC sensor and flexible positioning capability, the source of the disturbance doesn't matter. Image quality is ensured. IDE's MK5 is the most powerful EMI compensation solution available As proof of its technological leadership, IDE's new, high performance MK5 is an outstanding accomplishment in control. The MK5 provides the lowest noise level (<0.5nT) and greatest field reduction compensation (up to 55dB) over a broad control bandwidth. Disturbances, both small and large (sensors can be placed in fields up to 400µT), are effectively cancelled to ensure the best image possible, every time. And the performance benefits do not stop there. MK5 provides probe placement where you need it most In response to demands for greater precision in the SEM and TEM environment, IDE's MK5 has proven invaluable. Its compact sensor design and higher DC allowable field permit probe positioning close to the microscope column without interference effects. Even very tall TEM columns in broad field gradients can be protected effectively with IDE's flexible 3-axis compensation and two sensor input capability. MK5 is a robust hardware package with the latest design features The IDE MK5 provides flexibility in a robust hardware package. With the combination AC/DC sensor for flexible positioning, 6 output channels for high power output, and custom configurable snap together cage for greater serviceability, the MK5 is the only product for all of your EMI compensation needs. The MK5 easy to use software features are accessed by a sleek, touch screen user interface. Auto-tune functioning, expanded diagnostic capability, USB or RS232 remote connectivity, and event logging make this state of the art MK5 technology the most user friendly EMI compensation product on the market today. With IDE's MK5, EMI compensation has been bought to an extraordinary level without sacrificing the look of your lab or its safety The IDE MK5 is designed with the aesthetic feel of your laboratory in mind. The system incorporates three pairs of Helmholtz coils which can be wall-mounted or configured inside a freestanding cage which blends into the room environment. There are no dangling wires and no trip hazards which plague competitive systems. It has been proven: There is nothing comparable to the MK5 from IDE.
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Equipment Front End Module Solution Designed to meet the highest demands of modern semiconductor manufacturing, the IDE Tensor EFEM system delivers outstanding performance with a full range of configurations for every application. Combining exceptional throughput, accuracy, cleanliness, and reliability, the IDE Tensor EFEM system supports the highest productivity for advanced semiconductor manufacturing. Headquartered in Europe, our worldwide production and support network ensures seamless collaboration with equipment manufacturers. With short lead times, high production capacity, and superior quality, we quickly and reliably meet the demands of our customers. Dimensions:
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EMI Cancellation System - Greatest field reduction capability over the broadest control bandwidth - Flexible installation options including in wall, wall mount or cage mount - Three axis compensation - Easy to use software from a sleek touch screen user interface
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