By Integrated Dynamics Engineering GmbH
Active isolation provides "real time" 6 degrees of freedom control utilizing pneumatic air spring, coil spring or elastomeric springs as the basis for this unique hybrid approach. This combination allows for two significantly different approaches, SMS soft mount systems and HMS hard mount systems.
Payload up to several tons Extremely accurate horizontal & vertical motion range Cleanroom class ISO 1 Vacuum tool compatible Tool integrated w/o footprint increase
CATEGORY
Active Vibration Platform - Sandwich style isolation platform - Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances - Compact design with integrated controller enables easy installation and tuning - Ultra-fast settling time - Stage and floor feed-forward options
CATEGORY
Sandwich style isolation platform Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances Compact design with integrated controller enables easy installation and tuning Ultra-fast settling time Stage and floor feed-forward options
CATEGORY
