Clean solutions for all OEM process tools. Our innovative technologies can redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity. Overview - State-of-The-Art Cleaning Facilities - Full kit management - Assemblies, valves, traps, lid rebuild - OEM Compliant - Automated Statistical Process Control (SPC) We offer complete service programs for the following fab areas: - PVD - CVD - Etch - Diffusion metalware - Lithography - Ion Implant - Photo - OEM Certified for: ASML, Applied, ASM, KLA, LAM, TEL, and Varian Data and Analysis - All process data captured - All process data on-line - CMM - Dimensional analysis lab - SEM / EDX - ICPMS - QIII Surface Particles - On-line job tracking - B2B Services An Inside Look At Our Facility Capabilities - Cu segregation - Al TWAS - Ultra TWAS for high stress films - Cu TWAS - Ss TWAS - Alumina ceramic - Yttria ceramic - Yttria Blend ceramic - Ultra Yttria ceramic - Automated Flow Conductance - Inner Passage Particle Measurements - Inner Passage moisture control - Automation - Robotic Bead Blast, Robotic Polishing, Robotic Pressure Washing - Environmental Friendly Cleaning w/ Zero nitric oxide (NO) emissions - Precious / Conflict Metal Reclamation - Non-Abrasive Plasma Coat Cleaning - Robotically controlled contactless hole dim measurements - High Purity Cleaning - Trace Metal Reduction Cleaning - ISO-Class 5 Dedicated areas for Ceramic and Quartz - ISO-Class 4 mini environments
