Pentagon is the industry leader in assembly refurbishment, boasting 20 years of experience in upper lid assembly refurbishment to meet OEM standards. Their assembly program enhances Mean Time Between Changes (MTBC) by alleviating the need for full disassembly and reassembly at the tool. This efficiency is complemented by their high-quality cleaned parts and first pass chamber services, ensuring repeatability and reliability. Overview - Valving - Lid Assemblies - Cold traps - Ion Implant line assemblies - Process kits, such as DPS, IMP, and Encore Capabilities - Fully Assembled Lift Capacity of 600lbs - Helium Leak Check - OEM Torque Specifications - Specialized Packaging and Handling - Full Refurbishment Programs - Specially Trained & Dedicated Technicians - Customizable Best Known Methods (BKMs) and Processing - In-Line Particle Counting - Disassembly and Assembly Stations - Chemline Flushing Station: For thorough cleaning and preparation - Build Capability in Cleanroom: Up to 50lb - ISO-Class 4 and ISO-Class 6 cleanrooms
