By Nanosurf AG
Nanosurf delivers fully automated, high-precision AFM solutions for silicon wafer metrology without compromising on accuracy, throughput, or reliability. - WaveMode on DriveAFM enables measurements up to 15 times faster surface roughness measurement than traditional AFM modes. - The Alphacen 300 Drive is designed for fully automated operation. - Obtain higher yield with reliable sub-Ångström surface measurements. - Lower overall cost of ownership by reducing probe wear with WaveMode and precisely controlled tip–surface interactions. Unmatchable Speed Nanosurf has introduced the unique WaveMode, an off-resonance AFM mode. With its up to 15x speed compared to conventional techniques, it is the fastest off-resonance mode on the market. WaveMode is possible thanks to the CleanDrive technology, consisting of a second laser which excites the cantilever off-resonance phototermically; unlike other implementations of off-resonance modes, WaveMode has the advantage that it does neither need nor rely on subtraction of any parasitic background. The fast scanning capability means higher throughput for applications in the semiconductor industry. Reproducible and Consistent Results Wavemode, Nanosurf’s advanced photothermal off-resonance mode, delivers outstanding noise performance, ensuring highly accurate surface roughness measurements while maintaining imaging stability and superior quality. Its capability of precisely controlling interaction forces below 1 nN preserves tip sharpness over long periods of time, greatly reducing cost of ownership. In our dataset, collected over 10 consecutive days, the distribution of measured roughness remains consistent, and this confirms that the tip quality is preserved from start to finish and delivering low noise datasets.
