By Montana State University - Montana Microfabrication Facility (MMF)
The MMF offers a range of processing and packaging capabilities, including photo and electron beam lithography, wet and dry etching, sputter deposition, thermal and electron beam evaporation, chemical vapor deposition, metrology, and inspection. University researchers and industry clients are active in a variety of applications and research areas, including: 1. Optics and Silicon Photonics 2. Micro- and Nano-ElectroMechanical Systems (MEMS/NEMS) 3. Microfluidics and Sensors 4. Physics, Chemistry, and Materials 5. Mono and Bilayer Semiconductor Devices 6. Advanced Packaging 7. Geology and Earth Sciences 8. Life Sciences, Medicine, Microfluidics, and Biosensors 9. Education and Outreach
