By ASRC Nanofabrication Facility
ICP Etcher – Chlorine (Oxford PlasmaPro System 100 Cobra) Oxford Instruments $ / Hour: $ 45 (CUNY Rate), $ 50 (Outside Academic), $ 150 (Start-Up Companies), $ 250 (Industrial Companies) ICP Etcher – Fluorine (Oxford PlasmaPro System 100 Cobra) Oxford Instruments $ / Hour: $ 45 (CUNY Rate), $ 50 (Outside Academic), $ 150 (Start-Up Companies), $ 250 (Industrial Companies) DRIE Etcher (Oxford PlasmaPro System 100 Cobra) Oxford Instruments $ / Hour: $ 45 (CUNY Rate), $ 50 (Outside Academic), $ 150 (Start-Up Companies), $ 250 (Industrial Companies) Reactive Ion Etcher (Oxford PlasmaPro NPG80) Oxford Instruments $ / Hour: $ 43 (CUNY Rate), $ 48 (Outside Academic), $ 144 (Start-Up Companies), $ 240 (Industrial Companies) Plasma Asher (PVA Tepla IoN 40) PVA TePla $ / Hour: $ 33 (CUNY Rate), $ 36 (Outside Academic), $ 108 (Start-Up Companies), $ 180 (Industrial Companies) UV Ozone Cleaner (SAMCO UV-2) SAMCO $ / Hour: $ 25 (CUNY Rate), $ 28 (Outside Academic), $ 84 (Start-Up Companies), $ 140 (Industrial Companies) Vapor HF Etcher (SPTS Primaxx) SPTS Techonologies $ / Hour: $ 20 (CUNY Rate), $ 25 (Outside Academic), $ 75 (Start-Up Companies), $ 125 (Industrial Companies) Xenon Difluoride Etcher (SPTS Xactive E1) SPTS Techonologies $ / Hour: $ 20 (CUNY Rate), $ 25 (Outside Academic), $ 75 (Start-Up Companies), $ 125 (Industrial Companies)
