By Expertech
With decades of experience manufacturing the latest thermal reactors and refurbished systems, Expertech develops high-technology diffusion furnaces for processing MEMS. Our team has provided over 1500 furnace process tubes and more than 100 vertical furnaces, including new, remanufactured, certified used, and as is to suit a range of thermal processing applications for various industries. CTR and VTR systems offer atmospheric and LPCVD capabilities to meet your needs. Using processes on silicon adapted from the semiconductor industry, MEMS devices are manufactured to provide small-scale sensors, actuators, accelerometers, and gyroscopes. They typically require thicker films with low intrinsic stress, uniform properties, and excellent step coverage. With vast technical expertise, Expertech develops CTR or VTR diffusion furnaces to help rapidly characterize your MEMS film processing, offering device processing steps, including: LPCVD Processes - Low-Stress Nitride (Si Rich Nitride) < 250 MPa - Ultra-Low Stress Silicon Nitride < 100 MPa - Undoped Polysilicon or a-Silicon - Phosphorous-Doped Polysilicon or a-Silicon - Boron-Doped Polysilicon or a-Silicon - Undoped Poly-SiGE - Phosphorous or Boron-Doped Poly-SiGE - LTO - TEOS Atmospheric Pressure Processes - Wet or Dry Oxidation/Densification - Inert Gas Anneals/Densification (N2, Ar, He) - Reducing Atmosphere Anneals Expertech is a thermal processing equipment manufacturer and servicer with over 30 years of experience. Maintaining one of the largest inventories of thermal reactor parts for current and obsolete systems, we offer modification, repair, and improved functionality for your systems, as well as training opportunities to meet the needs of your facility. We provide new and refurbished vertical, compact, and horizontal diffusion furnaces for processing MEMS with atmospheric and LPCVD capabilities for high-quality, consistent operations and uniform properties.
