By JC Nabity Lithography Systems
Almost any SEM or STEM can be used with NPGS to perform e-beam lithography. The following is an alphabetical list of the microscopes that have been used with NPGS. Note that some models require optional external inputs from the manufacturer. Often, different models of microscopes from the same manufacturer will have the identical XY interface. While NPGS can be used with the most basic of manual SEMs, it also has very advanced features that make use of automated stages and the serial interface to a digital SEM. Free software drivers are available with NPGS for microscopes from Hitachi, JEOL, Zeiss/LEO/Leica, Tescan, and FEI/Philips. Free software drivers are available with NPGS for stages from Deben Research, Hitachi, JEOL, Zeiss/LEO/Leica, FEI/Philips, Kleindiek. A free software driver is available with NPGS for the OmniProbe GIS. The NPGS Manual gives typical transition values for many SEM models and provides additional information on determining the optimum magnifications for pattern writing for any microscope.
