Since 1999, Protron Mikrotechnik GmbH has been developing and manufacturing high-performance MEMS devices. Our engineering team combines long-standing process expertise with practical experience in RF-MEMS, microfluidics, micromechanical sensors and optical microsystems. We support the complete development chain — from requirements analysis and FEM simulation to prototype fabrication, characterization and scalable production on 100mm and 150mm wafer processing lines. Concept & System Design - Requirements Definition - Multiphysics FEM Simulation - Layout & Mask Design Prototyping & Process Development - Silicon Bulk Micromachining - Silicon Surface Micromachining - Back-End Processing Test & Validation - Structure & Material Analysis - Laserscanning & Electron Microscopy - Reliability Testing Small-Series & Volume Production - 100mm & 150mm wafer production lines - Process Stability Monitoring - Quality Management ISO 9001:2015
