By IONTOF GmbH
The monitoring of organic contaminants becomes more and more important for the semiconductor industry. TOF-SIMS provides detailed inorganic and organic information about the wafer surface. Possible sources of contaminants are: - Process Chemicals (photoresists, cleaning agents (PO X, SO X, …) - Contact Contaminants (gloves, tools, wafer holders, …) - Cleanroom Contaminants (filter-related components, adsorbates,...) - Packing Materials (wafer boxes,...)
