The Helios 5 is a DualBeam focused ion beam microscope (FIB). It has an electron column for ultra-high-resolution scanning electron microscopy (SEM) tasks and a xenon (Xe) plasma ion column for sample preparation for TEM and atom probe tomography (APT), as well as for 3D characterization of materials. Use of the Auto Slice & View software in combination with our Oxford Instruments Ultim®Max energy dispersive X-ray spectrometer (EDS) and/or Oxford Instruments Symmetry® Electron Backscatter Diffraction (EBSD) detector allows fully-automated multi-modal materials characterization workflows. Available detectors: in-lens SE/BSE detector (TLD) Everhart-Thornley SE detector (ETD) in-chamber electron & ion detector (ICE) for secondary ions (SI) and electrons (SE) retractable STEM 3+ detector (BF/DF/HAADF segments) Flexible 5-axis motorized stage: tilt range: -15° to 90° max. weight: 500g in any stage position, 5kg at 0° tilt Oxford Instruments Ultim®Max energy dispersive X-ray spectrometer (EDS) Oxford Instruments Symmetry® Electron Backscatter Diffraction (EBSD) detector MultiChem™ Gas Injection System (GIS) for Pt, W and C deposition EasyLift™ NanoManipulator for in situ sample manipulation Auto Slice & View for 3D material characterization by FIB serial sectioning and analysis using EBSD and/or EDS, followed by advanced 3D visualization with the Avizo™ software available on our data processing and analysis workstation AutoTEM for automated TEM specimen preparation iFast Developer software for creating individual FIB/SEM automation workflows Resolution Electron beam: 0.6 nm at 30 kV (STEM) Electron beam: 0.6 nm at 15 kV Ion beam: 4.0 nm at 30 kV (preferred statistical method) Ion beam: 2.5 nm at 30 kV (selective edge method) Beam parameters Electron beam current range: 0.8 pA to 176 nA Electron accelerating voltage range: 200 V – 30 kV Ion beam current range: 1 pA – 100 nA Ion beam accelerating voltage range: 500 V – 30 kV ThermoScientific Helios G5 CXe Plasma FIB/SEM in Chemistry & Materials Building, Room 122B.
