By Asia Pacific Microsystems Inc.
APM has internal Failure Analysis Lab for the purpose of identification of defect modes, trouble shooting of failure processes, and tuning of process recipes. In addition, APM also works with external laboratories for intensive failure analysis and reliability testing services. These external laboratories have comprehensive equipments and tools, and are located in Hsinchu Science Park. The collaboration with local vendors facilitates complete analysis capability and fast turnaround time for diverse needs from various customers. Scanning Electron Microscope Resolution: 1.0nm (15KV), 2.2nm (1.0KV) Photo Magnitude: 25~650,000 times Completely automated electron optics Specimen chamber for up to 200mm diameter specimen Energy Dispersive X-Ray Spectroscopy Analysis Range: B5 to U92 for Si wafer Qualitative and Quantative analysis Resolution: 133 eV Powerful X-ray mapping utility Atomic Absorption Spectrophotometer Resolution: ppm (Flame),ppb (Furnace) Chemical element: K Na Fe Cu Cr Au Al Ti Ni Mn As Pd Tl In Ca Mg Pb Ag Impurity analysis in chemical solution
