EBSD can provide valuable information about the grain structure, texture, and crystallographic phases of a sample (e.g. metals, semiconductors, ceramics). In general, a carefully prepared, plan sample is scanned by a focused electron beam. Electrons interacting by Bragg diffraction within the top nano meters of the surface form a diffraction pattern (Kikuchi pattern) at every scan point which can be detected and analyzed. The resulting maps can cover grains of millimeter, micrometer down to the nanometer scale, depending on the scan resolution used. With the same system but in a different geometry, electron transparent samples like TEM lamellae can be analyzed in transmission mode. This technique is called Transmission Kikuchi Diffraction (TKD).
