By Institut Catala de Nanociencia i Nanotecnologia (ICN2)
Characterisation and imaging is a key phase of most fabrication processes as a test point in the development cycle. As such, ICN2 Nanofabrication Facility features a broad range of instruments which are capable of achieving high resolution images, topographical imaging, measurements of films stress as well as surface steps and roughness imaging, amongst others. FEG-SEM FEI Inspect F50 High resolution surface topography imaging. Stylus Profilometer KLA Tencor – Alphastep D500 Characterises the surface steps and roughness of a material. Optical 3D Profiler Filmetrics – Profilm 3D Non-contact mapping of surface topology. 3D imaging Optical microscope Nikon – Eclipse 150L Up to x100 magnification
