Measure flatness, angle, parallelism and more. From Wafers, PCBs to automotive parts and medical devices, precision in flatness, warp and bow is crucial. Our metrology systems deliver fast, non-contact measurements of these critical parameters with micrometer and nanometer accuracy. With our range of sensor technologies and versatile system options, flatness can be measured accurately on almost any material. Achieve z-resolutions as fine as 0.1 nanometers or measure surfaces up to 650 x 650 mm².
