DaLI High Resolution Laser Lithography

By Nanocenter

DaLI is a high resolution laser lithography system for rapid prototyping on resist-coated substrates. The platform is based on a continuous UV laser, 2D acousto-optical deflectors and a high-precision xy table allowing direct optical nanolithography with a resolution of 1µm in a 10x10cm area. Fast writing is possible due to 100 kHz beam positioning with acoustic-optical deflectors.