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Lithography & NanopatterningFabrication & Surface Engineering

Test Structure Fabrication Using Laser Direct Exposure

By CiS Research Institute

Such test structures, which reflect the chip thickness and electrode geometry of the IC, can be fabricated at the CiS Research Institute using laser direct exposure processes. With such preparation, it is possible to connect the finished ICs within a few working days—without complex multilayer solder contact metallization—and subsequently characterize them.