By Ionautics
We have developed a robust reactive HiPIMS process to grow ITO using an indium-tin target in an oxygen-argon atmosphere. We are unique in that we are offering a reactive HiPIMS process for ITO. - Proven better coverage of complex-shaped surfaces: coat nano-structures - Room temperature process - Reactive process leads to higher deposition rate - Decreased lateral resistivity by decreased intercolumnar porosity - Decreased surface roughness
