With the Nanoworkbench from Klocke Nanotechnik probing is very fast, easy and secure. Possible applications are measurement of currents and voltages in 2, 3 or 4 point geometry. The stationary in-SEM assembly of the Nanoworkbench allows NanoProbing on any position of big wafers without moving the probe tips away. The Live Image Positioning module provides a simple point and click solution. The Nanofinger® operating as Scout allows a fast and secure automatic approach of all probes to the sample, also on isolators.The Nanofinger® tip can also be used as one of the electrical probes. Automatic macros and absolute positioning in superior precision allow to program measuring processes in closed loop with any feedback signal (Nanofinger®, current, force, etc) - 2, 3 and 4 probe geometry - the tip of the Nanofinger® operating as Scout can also be used for electrical probing - customized tips available - 1 nm tip movement resolution - repeatability better than 50 nm - 20 mm tip stroke in xy, 10 mm in z-direction - low-resistivity low-noise shielded cable sets from tip to COAX connectors outside of the chamber Nano Probing is an application package of the Nanoworkbench Also available as a standalone module
