The k-Space Associates ICE system (Integrated Control for Epitaxy) measures several thin film parameters in real time during growth, for the most accurate control of conditions and film properties. * Substrate or thin film temperature by emission-corrected pyrometry (425 – 900° C) * Reflectivity and emissivity * Film thickness, growth rate, and index of refraction (n and k) * Film stress and substrate curvature.
Compiled from http://www.ajaint.com
