MPW Run: Batched approximately every two months and processed at the same time as other orders. Lowest cost. 0.5 sq. mm of writing area is included. Dedicated/Custom: Orders that have special requests outside of the scope of MPW runs, and/or special pricing. Substrate Type - Only 220 nm SOI (2 μm BOX) is available in silicon MPW runs, and 400 nm SiN (3 μm BOX) is available in SiN MPW runs. Device Layer Polarity - Negative tone (polygons = remaining device layer) is currently the only choice for MPW runs. In dedicated/custom runs, positive tone (polygons = etched device layer) or mixed (for multi-layer projects) may also be selected. Top Oxide Cladding - Standard oxide thickness: 2.2 μm for silicon MPW runs, 3.0 μm for nitride MPW runs. Metallization - Tri-Layer: Excellent for implementing heaters for thermo-optic control. Requires standard oxide cladding. Direct Metallization: Used for implementing metal pads directly on device layer. Must not have any cladding oxide. Deep Trench (for Edge-Coupled Devices) Custom Dicing SEM Metrology - Regions to be imaged indicated on Layer 200. Alcyon Photonics Fabcode - This order uses Alcyon Photonics PDK black box components. Please enter the fabcode issued by Alcyon Photonics for this order. Designs can be uploaded once the order is created. The design can be re-uploaded as many times as needed before the submission deadline.
