Exilis for Highly Conformal Dielectric Insulation Low-k Dielectrics for Semiconductor Applications GVD's Exilis is a proprietary CVD polymer that exhibits unparalleled conformality and protects in harsh environments. Exilis was developed in support of DARPA's heterogeneous integration programs, and may be applied on chip, wafer, or device level. Surface agnostic, micron thin and ultra-conformal Deposited using a contactless chemical vapor deposition (CVD) process and uniquely suited for miniaturized, geometrically complex, and high-density structures with aspect ratio features of over 50:1. Low-k material with a high dielectric strength Exhibits superior dielectric properties ideal for ultra-thin insulation, even at high RF and microwave frequencies. Enables reliability in moisture-rich environments A robust, protective film provides environmental protection and survives 1000 hours of temperature-humidity-bias (THB) testing at only hundreds of nanometers. Thermally and chemically stable Withstands continuous temperatures of up to 265°C and well-suited to challenging manufacturing conditions. Exilis Properties Material Overview Appearance: Smooth, transparent, and free of blisters, cracking, peeling, or wrinkles Continuous Operating Temperature Range: -70°C to 265°C Typical Thickness: 300 - 1000 nm Material Properties 85°C/85 RH THB Test: JESD-22-A101C, 1000 hours | Pass Vacuum Stability & Outgassing: ASTM E595 | Meets the historical TML and CVCM Dielectric Constant: MDC Mercury Probe @ 1MHz | 2.62 Dissipation Factor: MDC Mercury Probe @ 1MHz | <0.001 Dielectric Strength: MDC Mercury Probe @ 1MHz | 7200 V/mil Young's Modulus: Nanoindentation | <3.4 GPa Conformality: Misc. | Aspect ratios up to 50:1 Exilis is Ideal For: 3DHI Microsystems Wafer-Level Packaging (WLP) Technologies Microelectromechanical Systems (MEMS) SiP (system-in-package) Technologies Exilis FAQs Has GVD performed chemical compatibility testing with common fuels, hydraulic fluids, oils, solvents/cleaners? While we do not have an exhaustive list of chemical compatibility testing on file, the coating is expected to be chemically stable in the presence of a variety of substances, and insoluble in typical solvents due to its densely cross-linked structure. If needed, we are happy to review substances on a case-by-case basis, or provide samples for testing. Is Exilis easy to scratch off using a blade? The coating is robust and easily withstands regular handling/rubbing. However, because it's a thin film of 1 um or less, it will get damaged if a sharp object is used repeatedly to scratch the surface. How do you check for pinholes? We do not explicitly check for pinholes batch to batch. Due to the nature of the (CVD) deposition process, pinholes are unlikely. One of the biggest factors that can affect coating performance is surface contamination; therefore, a clean and residue-free surface is critical to the adhesion of the Exilis coating. Is there a post-processing step post coating? The coating is fully polymerized post-deposition, and does not require any additional steps once the recipe is complete. What are the possibilities for process control? Due to the nature of the CVD process, all critical process parameters are tightly controlled and highly repeatable.
