By Scientific Center for Optical and Electron Microscopy (ScopeM)
The Helios 600 i is a FIB / SEM with cryo stage. Elstar™ Schottky field-emission SEM technology Tomahawk FIB with low kV operation down to 500 V and beam currents up to 65 nA 150×150 mm high precision, high stability piezo stage Complete and integrated suite of prototyping capabilities, with 16-bit pattern generator for FIB & SEM, advanced patterning library Technical details Camera / detectors: Elstar in-lens SE detector (TLD-SE), Elstar in-lens BSE detector (TLD-BSE) Everhart-Thornley SE detector (ETD) High performance SE and SI (secondary ion) detector (ICE) Retractable low voltage, high contrast solid-state electron detector (vCD) Retractable STEM detector with BF/DF/ HAADF segments IR camera for viewing sample/column Beam current measurement Software: AutoFIB™ package for macro and script based DualBeam automation AutoTEM™ wizard – automated TEM sample preparation NanoBuilder™ CAD based (GDSII) solutions for nanoprototyping of complex structures AutoSlice and View™ – automated sequential mill and view to collect series of slice images MAPS correlative workflow Drift Compensated Frame Integration (DCFI) Directly imported BMP file or streamfile for 3D milling and deposition Column spec: Landing voltage range E-beam: 50V – 30 kV with Beam Deceleration mode I-beam: 500 V – 30 kV, Ga liquid metal ion source Probe current E-beam: up to 22 nA I-beam: 1 pA – 65 nA Key features: Charge Neutralizer Plasma cleaner AutoProbe 200.2 VCT 100 & Cryo stage Electron beam resolution @ coincident point 1.0 nm at 15 kV 1.6 nm at 5 kV 2.5 nm at 1 kV GIS - Beam chemistry Platinum deposition Tungsten deposition Carbon deposition Manuals: Instrument manual Booking rules The following general booking rules apply: One can book up to 14 days in advance One cannot book more than two half-day slots per week during “office hours” (8–18 h) The booked slot may fall into two categories: Typical 5-hours slot between 8–18 h, such as 8–13 h or 13–18 h (shorter slots are allowed) Off-hours slot: evening (18–8 h) and week-ends; for these you need a special “Off-Hours” license A full-day booking is allowed for cryo applications The slot can be modified or deleted 36 hours prior its start; afterwards, only ScopeM staff can make changes, upon the user presenting a replacement person or a case of “force majeure” More than two slots per week can be booked if the desired free slot is in the next 48 hours.
