By Institute of Physical Chemistry, Bulgarian Academy of Sciences
An optical microscope that provides a three-dimensional image of the surface of the specimen, and can examine both very low reflection and large-specimen specimens. Vertical (Z) resolution <1 nm. Field of view from 0.006 mm² to 15 mm 2. Increase 5x, 20x, 50 and 100x. Submicronal lateral resolution. Fast response <1 minute. Integrated Spectrum Reflectometer allowing measurement of multilayer stack thickness or n & k values if known thickness (spectral range: 430-750 nm, thickness range 30-50,000 nm).
