By micro resist technology GmbH
In conclusion, the QUANTIHEAT project enabled an increase of industrial competitiveness for MRT through strengthened capabilities in innovative products and services: these include custom tailored UV- and T-NIL products, know-how about product formulation developed during the project and properties, as well as the combination of NIL to other nanotechnology processes like ALD and the potential of such technology conjunctions to open up new possible applications.
