Vistec Electron Beam GmbH operates a calibration laboratory. The laboratory is accredited by the DAkkS (Deutsche Akkreditierungsstelle) for measurement of the SI unit "Length" since 1994. Services include: Measurement of positions and distances of both uni - and bidirectional edges on flat substrates (Chrome/Glass - masks) Calibration of: - line scales (stage micrometers) - two dimensional calibration standards (cross structure arrays, circle pattern arrays) - center coordinate, diameter and roundness of chrome-circles - grid orthogonality and angle between microstructures - line width of microstructures Contact: Mr. Uwe Schinkel, Phone: +49 3641 7998 175, Fax: +49 3641 7998 222, measurement@vistec-semi.com
