Radiant Technologies has a complete integrated ferroelectric capacitor process running on 5-micron design rules. Capacitors as small as 5µ on a side up to 1 centimeter on a side consisting of 2600Å 20/80 PZT or 1µ 4% niobium-doped 20/80 PZT. The capacitors are passivated with Radiant's patented interlayer dielectric stack allowing them to be packaged in TO type transistor packages. A set of design rules and a pre-formatted wafer file in GDS-II format are available upon request. At some time in the near future Radiant will expand the foundry process to allow the fabrication of piezoelectric cantilevers, membranes, and platforms. Please contact us with any requests.
