By Melbourne Centre for Nanofabrication
Critical point drying is a process used to dry Micro-electromechanical Systems (MEMs). Forces from the changing of liquid to gaseous phase in traditional drying techniques can destroy a device. The use of supercritical fluid bypasses this phase change, protecting the device in the drying process. MCN's critical point dryer is the Quorum K850WM. The dryer is optimised for MEM drying and can hold 4 and 6-inch wafers. The dryer can also be used for SEM preparation.
