By memsstar
As the leading remanufacturer of Lam etch equipment serving the European, Asian and USA markets, memsstar delivers the broadest capability set for the like-new refurbishing, repurposing or process development to support etch processes for mainstream semiconductor manufacturing or novel applications. Alliance 4420XL, 4520XL and 4720XL series Exelan, ExelanHPT 9400 and 9600 Microwave Strip Key Features Cluster platform Wafer sizes up to 200mm Feature sizes from 0.25 to 0.18 micron Accepts a broad range of Lam process chambers Modular design Fully automated, serial or parallel processing Vacuum cassette elevators Rainbow 4400 series for polysilicon etch 4500 series for oxide etch 4600 series for metal etch 4700 series for tungsten etch Key Features Wafer sizes up to 200mm Feature sizes down to 0.35 micron Parallel plate etchers Mechanical or ESC clamping
