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Technical TrainingInfrastructure & Training

Semiconductor Training

By memsstar

Professional training is an important enabler for our customers, to make sure that the skills and knowledge exist within your operation to get the best machine performance and cost of ownership. memsstar technical training takes place at the customer site, and is delivered after careful consultation to identify the correct training products for your business needs. Target Audience Operators, maintenance technicians, equipment engineers, process engineers, development engineers, and health & safety practitioners. Courses include up to 8 students per class, with training ideally split between classroom and access to equipment. Training Material All of our training material is created by memsstar based upon our wealth of experience and knowledge, and is delivered by fully qualified and certified technical trainers. Students will receive hard and soft copy of materials, and can be assessed during training if required. Attainment certification will be supplied. Semiconductor Training Course Structure Customers select a platform and/or chambers as the subject of the course, and then a level to which the training is targeted, and finally which modules should be included. Platforms: 150mm, 200mm AMAT – P5000, Centura, Endura Lam – Rainbow, Alliance Novellus – Concept One (C1), Concept Two (C2); 300mm Endura/Endura 2 Basic operation and basic theory Level 1 – Basic maintenance and preventative maintenance Level 2 – Advanced maintenance and fault finding 150mm/200mm Applied Materials P5000/Centura/Endura Module / Days / Comments Tungsten 1 Basic Tantalum (Nitride) 1 All variations Copper 1 All variations Titanium (Nitride) 1 All variations Preclean 1 Reactive Preclean 1 CVD TiN TxZ 2 Purge, cool down, major PM Mainframe 2 HP+/VHP+ Robot 2 Handoffs, full bearing PM Standard/WB/NB loadlocks 2 Setup, fault finding Basic Process 2 Etch, PVD and CVD MxP/MxP+ 2 Etch hardware DPS 2 Etch hardware DxZ, DxL 2 CVD hardware P5000 frame, robot 3 All variations, calibrations and setups Lam Research Alliance and Rainbow Training Module / Days / Comments 4420 chamber 1 All variations 4520 chamber 1 All variations 4520 isotropic module 1 All variations 9400 chamber 1 All variations 9600 chamber 1 All variations DSQ chamber 2 Basic process 2 All variations Mainframe 1 Basic Novellus C1 and C2 Training Module / Days / Comments C1 mainframe 1 Basic Process chamber 1 All variations C1 handling 1 All variations C2 DLCM 1 All variations SPEED chamber 1 All variations ALTUS chamber 2 Basic process 2 All variations Applied Materials 300mm Endura/Endura 2 Training Module / Days / Comments Clean Tungsten 1 Aluminium 1 Cu 1 EnCoRell, RFX RF PVD 1 Variations Ti (N) or TA (N) 1 SiP, EnCoRe PC, RPC 2 XT and XTE SiCoNi 2 Producer CVD TxZ 2 STAR control ALD TaN, TiN 2 Centura ALPS PVD 1 Ni, Pt, Co, NiPt Mainframe 2 SWLL inc. 4.0 Fi, 5.3 Fi 2 Kens, TDK, Yasakawa, Brooks, Sinfonia VHP+ XP 2 For further information on our semiconductor training, please contact us to discuss your requirements.