By Chicago Materials Research Center
The LEXT OLS 5000 is a surface metrology 3D microscope. The LEXT creates 3D scans of sample surfaces with height resolution down to 5 nanometers with NIST-traceable accuracy. 3D scans take just seconds and the software suite allows full characterization of samples including roughness, curvature, step heights, line profiles, and other material parameters. The LEXT can accommodate almost any sample up to 4”x4”x4” without any special preparation required or the restrictions of SEMs or AFMs Specifications - 405nm laser - Sample sizes up to 4" - 5nm step height resolution - 1nm rms height noise - Motorized stage for large-field stitching - Film thickness mode - DIC - Polarization - Dedicated LEXT objectives: 5X, 10X, 20X, 50X, 50XLWD, 100X - Analysis modules: Advanced analysis, film thickness, auto edge, particle analysis, mult-data analysis, sphere/cylinder
